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SW-200-3-30-R-81-K

Series: VDM Series Vapor Delivery Module Brand: Bronkhorst
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  • Heater Size - W-200 (1/4”OD MFC & 1/8”OD LFM Outlet) - 100 W
  • Mix Valve - Factory Standard
  • Gas & Liquid Supply - Dual Carrier Gas, Liquis Flow &Dilution Gas Supply
  • Mains Power Supply - 220... 240 Vac
  • Tracing Control - None
  • External Communication - FLOW-BUS
  • Mix Outlet - 1/4” Face Seal Male
  • Purge Outlet - 1/8” O.D. Compression Type
  • Plunger Seat - Kalrez

Specifications

Brand

Approvals & Certifications

  • IEC 60320-1, C20 (Mains Supply Inlet), 60320-2-2, C13 (Female Tracing Outlet)

Maximum Heater Temperature

  • 200° C

Gas Flow Range

  • 0,05…10 ln/min Carrier Gas

Liquid Flow Range

  • 0…120 g/h Water, Precursor fluid, etc

Vapor Flow

  • 0,05…10 ln/min

Documentation

Data Sheets

View Product Series

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