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Model SLA7840 Pressure/Flow Controller
Brand: Brooks InstrumentModel SLA7840 is a 1-1/8" (28.57 mm) wide profile high purity metal sealed instrument that controls pressure while measuring flow rate.
The Model SLA7840 receives a remote pressure transducer signal, and using adjustable integral PID control electronics and a control valve, maintains a desired set pressure.
In addition to the pressure function, the Model SLA7840 provides a 0-5 V signal that is linear with mass flow rate. The Model SLA7840 can also be configured as a mass flow controller for calibration or test purposes.
Features- 1-1/8" (28.57 mm) Mechanical Platform
- High Performance Co-Planar Valve
- All wetted parts 32 Ra maximum to maintain particle, moisture and contamination free process conditions
- Digital Communication options offer easy commissioning and reduced system wiring
- Device can store 10 selectable calibrations and flow ranges
- CE Compliant
Specifications
Brand
Approvals & Certifications
- ISO 9001
- CE
- PED 97/23/EC
Seat / Seal Material
- Seal: Nickel
- Seat: 316L Stainless Steel
UNF/UNC Connection
- 8-32 UNC-2B
VCR / VCO Connection
- 1/4" VCR Male
Accuracy
- ± 1.0 % of Rate, Including Linearity (20 % to 100 % Full Scale)
- ± 0.2 % of Full Scale (Below 20 % Full Scale)
Flow Range
- 0-3 sccm to 0-30,000 sccm N2 eq
Repeatability
- ± 0.20 % of Rate
Pressure Range
- Maximum 500 psig
Operating Temperature
- 0° to 60° C (32° to 140° F)
- Non-Operating: -25° to 100° C (-13° to 212° F)
Wetted Material
- 316L Vacuum Arc Remelt (VAR), 316L, and High-alloy Ferritic Stainless Steel
- External/Internal Seals: Nickel
- Valve Seat: 316L Stainless Steel - Standard
Supply Voltage
- Analog I/O: +15 Vdc, ± 5 % (Traditional -15 Vdc Pin is Ignored)
- Digital I/O DeviceNet: 11-25 Vdc
Power Requirement
- Analog I/O Option, with Valve: 3.6 W Typical, 4.0 W Max.
- DeviceNet I/O Option, with Valve: 6.9 W Typical, 7.6 W Max.
