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5850EM Series Metal Sealed Thermal Mass Flow Controller
Brand: Brooks Instrument5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs.
Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Features- Long-term zero stability of < 0.2% full scale per year
- < 3 seconds settling time to command changes with negligible overshoot/undershoot
- Wide flow range – from 3 sccm up to 30,000 slpm
- High pressure rating - up to 1,500 psi
- Optional enhanced process internal finish - 5µ inch Ra avg
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanically and electrically compatible with other mass flow controllers
- TTL compatible "valve off" and purge function
Benefits
- All-metal flow path enhances gas purity and reduces leaks
- Proven long-term stability and accuracy across broad process and application range
- Excellent return on investment due to reliable performance
- Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
- Easily installed and serviced with analog only input/outputs
Specifications
Brand
Approvals & Certifications
- EMC
- CE
- EN 61326-1: 2006
Process Connection
- 1/4" Tube VCR
- Integrally Welded to Body: Standard 1/4" VCR® with 0.250" Bore; Optional 3/8" - 1/2" VCR
Repeatability
- 0.25% of Rate
VCR / VCO Connection
- 1/2” VCR
- 1/2” VCO
- 1/4” VCO
- 1/4” VCR
- 3/8” VCO
- 3/8” VCR
Flow Range (Full Scale Capacity)
- 5850EM: 3 to 30,000 sccm
- 5851EM: 10 to 100 slpm Nitrogen
Surface Finish
- Enhanced Process (5 Ra avg.) Internal Surface Finish (Optional)
Accuracy
- 1% F.S. Including Linearity
- 1.5% F.S. Including Linearity (>20 slpm)
Response Time
- Normally Closed Valve: < 3 sec
Analog Communication
- 4-20 mA
- 0-5 Vdc
Seal Material
- Nickel 200
Wetted Material
- Valve Seat: 316L, Viton® Fluoroelastomers, Buna-N, Kalrez® or Teflon®
Differential Pressure Range
- 5 to 50 psi (Gas and Range Dependent)
Operating Pressure
- Max 1,500 psi
Ambient Temperature
- Operating: 40° to 150° F (5° to 65° C)
- Non-Operating: -13° to 212° F (-25° to 100° C)
- 5851EM: 41° to 149° F (5° to 65° C)
Electrical Connection
- 15 Pin D Connector (DA-15P)
Power Supply/Consumption
- Normally Open Valve: 10.5 Watts
- Normally Closed Valve: 3.25 Watts
- Fiber Optic
- LED / MOCVD
- Semiconductor
- Solar
