MC–Series Gas Mass Flow Controller

Brand: Alicat Scientific

MC-Series Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 98+ gases across a very wide flow range – 0.01% to 100% of full scale. Highly customizable for easy integration.

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.
Features
  • Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature
  • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units
  • Gas Select: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list
  • Composer™: Define 20 custom gas mixtures of up to 5 constituent gases using our Composer™ firmware
  • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad
  • User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes
  • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration
  • Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed

Specifications

STP Reference Condition

  • 25° C & 1 atm

NTP Reference Condition

  • 0° C & 1 atm

Display

  • Monochrome LCD or Color TFT Display with Integrated Touchpad

Environmental Protection

  • IP40

Humidity

  • 0 to 95 % Non-Condensing

Wetted Material

  • 302, 303, 304, 316L & 430FR Stainless Steel
  • FKM
  • Alumina Ceramic
  • Brass
  • Glass
  • Gold
  • Heat-cured Epoxy
  • Heat-cured Silicone Rubber,
  • Polyamide
  • Silicon

Operating Pressure

  • 11.5 to 175 psia Common Mode Pressure
  • 11.5 to 75 psia Differential Pressure

Communication

  • RS-485 Serial
  • Modbus RTU (Over RS-232 or RS-485)
  • Modbus TCP/IP
  • DeviceNet
  • EtherCAT
  • EtherNet/IP
  • Profibus

Power Requirement

  • 12-24 Vdc, 250 mA (290 mA If Equipped with 4-20 mA Output)

Mass Flow Accuracy

  • 10 sccm Full Scale Through 20 slpm: ± 0.6 % of Reading & ± 0.1 % of Full Scale at Calibration Conditions, High Accuracy Option - ± 0.5 % of Reading or ± 0.1 % of Full Scale, whichever is greater
  • 0.5 to 5 sccm Full Scale & 5 to 5000: ± 0.6 % of Reading & ± 0.1 % of Full Scale at Calibration Conditions, High Accuracy Option - ± 0.5 % of Reading or ± 0.1 % of Full Scale

Repeatability (2σ)

  • 0.5 to 5 sccm Full Scale & 50 to 5000 slpm Full Scale: ± (0.2 % of Reading + 0.02 % of Full Scale)
  • 10 to 20 sccm Full Scale: ± (0.1 % of Reading + 0.02 % of Full Scale)

Accuracy

  • Temperature: ± 0.75° C
  • Pressure: ± 0.5 % of Reading
  • Analog Signal: ± 0.1 % of Full Scale Additional Uncertainty

Operating Temperature

  • -10° to 60° C

Response Time

  • Sensor: < 1 millisecond
  • Typical Indication: < 10 millisecond, Flow Rate Dependent

Operating Pressure Full Scale

  • 160 psia

Analog I/O

  • 4-20 mA, 0-5 Vdc, 1-5 Vdc, 0-10 Vdc

Totalizer Volume Uncertainty

  • ± 0.5 % of Reading in Additional Uncertainty

Steady State Control Range

  • 0.01 to 100 % of Full Scale

Typical Control Response Time

  • 30 milliseconds or 100 milliseconds

Valve Function

  • Normally Closed
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