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GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters
Brand: Brooks InstrumentFast responding, repeatable delivery of process gases with high and ultra-high levels of purity - that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides.
Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time.
Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.
Features- Long-term zero stability of <±0.5% full scale per year
- Settling times: 300 ms - <700 ms or 700 ms - <1 second
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
- Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
- MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Local display
- Optional SDS gas delivery
- DeviceNetTM, RS-485 L-Protocol and analog interfaces
Benefits
- High-performance components marathon tested to seven times semiconductor industry standards for reliability
- All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
- With MultiFloTM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
- Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
- GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
- Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
Specifications
Brand
Full Scale Flow Range
- GF100/GF120/GF125: 3 sccm to 55 slm
- GF120XSL: 4 to 25 sccm
- GF120XSD: > 25 sccm to 1 slm
Flow Accuracy
- +1% S.P. > 35-100%,
- +0.35% F.S. 2-35%
Wetted Materials
- PCTFE (on Optional Zero Leak Valve)
- SEMI F20 HP Compliant
- 304 Stainless Steel
- 316L Stainless Steel
- 316L VIM/VAR
- Hastelloy C-22
- KM-45 Stainless Steel
Power Supply/Consumption
- RS485/Analog: 6 W max @ +15 Vdc (+10%) or +24 Vdc (±10%)
- DeviceNet: 24 Vdc/250 mA Max.
- DeviceNet: 11-25 Vdc/545 mA Max.
Repeatability & Reproducibility
- 5-100% = ± 0.15% of S.P.
- 2-5% = ± 0.015% of F.S.
Operating Pressure
- Max. psia: 500 (kPa: 3,447, bar: 34.47) - GF120XSL, GF120XSD
- Max. psia: 100 (kPa: 689.5, bar: 7) - GF125
Temperature Coefficient
- Span: 0.05 % of Full Scale/°C
- Zero: 0.005% of Full Scale/°C
Differential Pressure
- 3-860 SCCM (psid: 7 to 45, kPa: 48.26 to 310.3, bar: 0.48 to 3.10) - GF100, GF120, GF125
- 7,201-55,000 SCCM (psid: 15 to 45, kPa: 103.4 to 310.3, bar: 1.034 to 3.103) - GF100, GF120, GF125
- 861-7,200 SCCM (psid: 10 to 45, kPa: 68.95 to 310.3, bar: 0.68 to 3.10) - GF100, GF120, GF125
- 10 Torr to 30 psid Typical - GF120XSL, GF120XSD
Control Range
- 5% to 100% (Normally Closed Valve) - GF101, GF121, GF126
- 2% to 100% (Normally Closed Valve) - GF100, GF120, GF125, GF120XSL, GF120XSD
- 3% to 100% (Normally Open Valve) - GF100, GF120, GF125
Display
- Top Mount Integrated LCD Display
Communication
- RS485+ (Model Specific)
- RS485 Diagnostic Port (All Models)
- DeviceNet (Model Specific)
Zero Stability
- < ± 0.15% of Full Scale Per Year (GF100, GF120, GF125, GF101, GF121, GF126)
- < ± 0.6% of Full Scale Per Year - GF120XSL, GF120XSD
Response Time
- Normally Closed Valve: 300 ms to < 1 sec
- SDS Gas Delivery: < 3 sec
- Normally Open Valve: <1.5 sec (Specific Models)
Electrical Connection
- 9-Pin “D” Connector
- 5-Pin M12 Connector
Operating Temperature
- 10° to 50° C (50° to 122° F)
Viewing Angle/Viewing Distance
- Fixed/10 feet (3.04 metres)
Approvals & Certifications
- EMC Directive 2014/30/EU Evaluation Standard EN 61326-1: 2013
- REACH Directive EC (1907/2006)
- RoHS Directive 2011/65/EU
Valve Type
- Normally Closed
- Normally Open - GF100, GF120, GF125
- Semiconductor Etch Tools
- Thin-Film Chemical Vapor Deposition Systems (CVD, MOCVD, PECVD, ALD)
- Physical Vapor Deposition (PVD) Systems
- Epitaxial Process Systems
