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Mass Flow Meters (MFM), Ranges Based on N2
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Bronkhorst developed the FLOW-SMS series for customers who are looking for process gas panels with optimal space efficiency.
On a compact, lightweight but still rugged mounting rail system one or more mass flow or pressure sensor modules can be combined with control valves, shut-off valves, mixing chambers, filters or any other functional module as per customer’s request.
The modular concept of the FLOW-SMS system offers great flexibility for the end-user with respect to modifications and serviceability.
The functional modules are ‘top-mount’, so they can easily be exchanged without removing the total assembly.
Features- Compact assembly ensures space efficiency and minimized dead volume
- Economical solution, low cost of ownership
- Tubeless construction reduces potential leak points
- Service friendly, easily accessible from the top
- Great flexibility regarding system extension or modification
- Pre-tested “Plug and Work” units, reducing custom testing requirements
- Analog or digital communication (RS232, DeviceNet, PROFIBUS DP, Modbus, EtherCAT, PROFINET, FLOW-BUS)
- Optional PROFIBUS Gateway offering cost-effectiveness at 3 or more channels
- Alarm and counter functions
- Control characteristics user-configurable
- Optional multi gas / multi range functionality
- Free software tools
Specifications
Brand
Accuracy
- ± (0.5 % of Reading + 0.1 % of Full Scale) - Mass Flow
- ± 0.5 % of Full Scale - Pressure
Applications
- Biotechnology & Chemical Installations
- Burner Control (Welding)
- Food & Beverage
- Semiconductors
- Solar Cell Fabrication
- Vacuum, Plasma, Sputter & Coating Processes
Approvals & Certifications
- ISO 9001, 14001
Communication
- DeviceNet
- FLOW-BUS
- Modbus
- PROFIBUS DP: Add 50 mA
- PROFINET
- RS-232
Consumption
- 3 W Solenoid Operated
- Controller: 320 mA - Max.
- Meter: 70 mA
Electrical Connectors
- Analog / RS-232 / PROFIBUS DP Power: 9-Pin D-Connector Male
- DeviceNet: 5-Pin M12 Male
- Modbus / EtherCAT / FLOW-BUS / PROFINET: RJ45 Modular Jack
- PROFIBUS DP Bus: 9-Pin D-Connector Female
Environmental Protection
- IP40 (Ingress Protection)
Flow Rate
- Mass Flow Controllers (MFC), Mass Flow meters (MFM): 0.06-3 mlₙ/min to 1-50 Lₙ/min
Load Impedance
- Analog Set Point: 0(4)-20 mA ~250 kiloohms, Max.
- Analog Set Point: 0-(5)10 Vdc > 100 kiloohms Min.
Measuring Time
- Settling Time: 1 to 2 seconds Above 5 % of Full Scale
Mounting Position
- Any Orientation
Operating Pressure
- psig: 145 (kPa: 1,000, bar: 10)
Operating Temperature
- -10° to 50° C (14° to 122° F)
Output
- 0-10 Vdc, Load Impedance > 2 kiloohms Min.
- 0-20 mA, Load Impedance 2 kiloohms Min.
- 4-20 mA, Load Impedance < 375 ohms, Max.
Power Supply
- 15-24 Vdc
Pressure Range
- Electronic Pressure Controllers (EPC): 5-100 Mbar to 0.5-10 bar
- Electronic Pressure Transducers (EPT): 2-100 Mbar to 0.2-10 bar
Repeatability
- < 0.1 % of Full Scale
- < 0.2 % of Reading
Response Time
- Response Time Sensor: < 0.1 second
Seat / Seal Material
- EPDM
- Kalrez (FFKM)
- Viton
Sensitivity
- 0.01 % of Reading/bar H₂ - Mass Flow
- 0.1 % of Full Scale/°C
- N2: 0.1 % of Reading/bar - Mass Flow
- Span: < 0.05 % of Reading/°C - Mass Flow
- Zero: < 0.05 % of Full Scale/°C - Mass Flow
Stability
- Control: < ± 0.1 % of Full Scale
Supply Voltage
- 24 Vdc Solenoid Operated
Turndown
- 1:50 for Mass Flow Measurement / Control Modules
Update Time
- Warm-Up: 2 minutes for Accuracy ± 2 % of Full Scale
- Warm-Up: 30 minutes
Wetted Materials
- 316L Stainless Steel
